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The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range

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dc.contributor.authorKurnaz, S
dc.contributor.authorÖzturk, Ö
dc.contributor.authorYilmaz, N
dc.contributor.authorÇiçek, O
dc.date.accessioned2023-11-27T11:59:26Z
dc.date.available2023-11-27T11:59:26Z
dc.date.issued2023.01.01
dc.identifier.doi10.1109/JSEN.2023.3305058
dc.identifier.eissn1558-1748
dc.identifier.endpage22284
dc.identifier.issn1530-437X
dc.identifier.issue19
dc.identifier.startpage22277
dc.identifier.urihttps://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=dspace_ku&SrcAuth=WosAPI&KeyUT=WOS:001087769200019&DestLinkType=FullRecord&DestApp=WOS
dc.identifier.urihttps://hdl.handle.net/20.500.12597/17897
dc.identifier.volume23
dc.identifier.wos001087769200019
dc.relation.ispartofIEEE SENSORS JOURNAL
dc.subjectCapacitive sensor
dc.subjectparylene C
dc.subjectpiezoelectric sensor
dc.subjectpiezoresistive sensor
dc.subjectpressure
dc.titleThe Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range
dc.typeArticle
dspace.entity.typeWos

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