Web of Science: The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range
No Thumbnail Available
Journal Title
Journal ISSN
Volume Title
Type
Article
Access
Publication Status
Metrikler
Total Views
0
Total Downloads
0
Abstract
Date
2023.01.01
Publisher
Description
Keywords
Capacitive sensor, parylene C, piezoelectric sensor, piezoresistive sensor, pressure