Statistics for The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range

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The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range 0

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