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The parylene C as a flexible substrate and passivation layer: A promising candidate for a piezoelectric, piezoresistive, and capacitive pressure sensor in low-pressure range

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dc.contributor.authorKurnaz S.
dc.contributor.authorOzturk O.
dc.contributor.authorYilmaz N.
dc.contributor.authorCicek O.
dc.date.accessioned2023-09-10T11:36:12Z
dc.date.available2023-09-10T11:36:12Z
dc.date.issued2023-01-01
dc.identifier10.1109/JSEN.2023.3305058
dc.identifier.issn1530437X
dc.identifier.scopus2-s2.0-85168755999
dc.identifier.urihttps://hdl.handle.net/20.500.12597/17065
dc.relation.ispartofIEEE Sensors Journal
dc.relation.ispartofseriesIEEE Sensors Journal
dc.rightsfalse
dc.subjectCapacitive sensor | Parylene C | Piezoelectric sensor | Piezoresistive sensor | Pressure
dc.titleThe parylene C as a flexible substrate and passivation layer: A promising candidate for a piezoelectric, piezoresistive, and capacitive pressure sensor in low-pressure range
dc.typeJournal
dspace.entity.typeScopus
person.affiliation.nameKastamonu University
person.affiliation.nameKastamonu University
person.affiliation.nameKastamonu University
person.affiliation.nameKastamonu University
person.identifier.scopus-author-id57194461535
person.identifier.scopus-author-id9250502400
person.identifier.scopus-author-id55363489600
person.identifier.scopus-author-id56460086900

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