Scopus: The parylene C as a flexible substrate and passivation layer: A promising candidate for a piezoelectric, piezoresistive, and capacitive pressure sensor in low-pressure range
No Thumbnail Available
Journal Title
Journal ISSN
Volume Title
Type
Journal
Access
false
Publication Status
Metrikler
Total Views
2
Total Downloads
0
Abstract
Date
2023-01-01
Publisher
Description
Keywords
Capacitive sensor | Parylene C | Piezoelectric sensor | Piezoresistive sensor | Pressure