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The Use of Parylene C as a Flexible Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range (<4 Kpa)

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dc.contributor.authorKurnaz, Sedat
dc.contributor.authorOzturk, Ozgur
dc.contributor.authorYILMAZ, Nurdane
dc.contributor.authorÇİÇEK, Osman
dc.date.accessioned2026-01-04T16:14:42Z
dc.date.issued2022-01-01
dc.description.urihttps://doi.org/10.2139/ssrn.4264089
dc.identifier.doi10.2139/ssrn.4264089
dc.identifier.eissn1556-5068
dc.identifier.openairedoi_________::9a463ca1ec239949d2b0e541165437a0
dc.identifier.urihttps://hdl.handle.net/20.500.12597/39374
dc.language.isoeng
dc.publisherElsevier BV
dc.relation.ispartofSSRN Electronic Journal
dc.titleThe Use of Parylene C as a Flexible Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range (<4 Kpa)
dc.typeArticle
dspace.entity.typePublication
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