Dielectric properties, electric modulus and conductivity profiles of Al/Al2O3/p-Si type MOS capacitor in large frequency and bias interval

Tan, SOCicek, OTurk, CGAltindal, S2023-04-192023-04-192022.01.012215-0986https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=dspace_ku&SrcAuth=WosAPI&KeyUT=WOS:000821043900001&DestLinkType=FullRecord&DestApp=WOShttps://hdl.handle.net/20.500.12597/11221Dielectric properties, electric modulus and conductivity profiles of Al/Al2O3/p-Si type MOS capacitor in large frequency and bias intervalArticle10.1016/j.jestch.2021.05.021WOS:00082104390000127