The parylene C as a flexible substrate and passivation layer: A promising candidate for a piezoelectric, piezoresistive, and capacitive pressure sensor in low-pressure range

Kurnaz S.Ozturk O.Yilmaz N.Cicek O.2023-09-102023-09-102023-01-011530437Xhttps://hdl.handle.net/20.500.12597/17065falseCapacitive sensor | Parylene C | Piezoelectric sensor | Piezoresistive sensor | PressureThe parylene C as a flexible substrate and passivation layer: A promising candidate for a piezoelectric, piezoresistive, and capacitive pressure sensor in low-pressure rangeJournal2-s2.0-85168755999