The Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure Range

Kurnaz, SÖzturk, ÖYilmaz, NÇiçek, O2023-11-272023-11-272023.01.011530-437Xhttps://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=dspace_ku&SrcAuth=WosAPI&KeyUT=WOS:001087769200019&DestLinkType=FullRecord&DestApp=WOShttps://hdl.handle.net/20.500.12597/17897Capacitive sensorparylene Cpiezoelectric sensorpiezoresistive sensorpressureThe Parylene C as a Flexible Substrate and Passivation Layer: A Promising Candidate for a Piezoelectric, Piezoresistive, and Capacitive Pressure Sensor in Low-Pressure RangeArticle10.1109/JSEN.2023.3305058001087769200019222772228423191558-1748